@misc{MeyerSchmidt2023, author = {Jan Christoph Meyer and Carsten Schmidt}, title = {Carl Zeiss SMT AG - Produktionsplanung und -steuerung unter der Lupe}, booktitle = {Im Blickpunkt - Deutschlands Elite-Institute}, volume = {10}, number = {1}, institution = {FIR e. V. an der RWTH Aachen}, type = {contributiontoperiodical}, pages = {116 -- 117}, year = {2023}, }